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Impact of Implantation Conditions on the In-Depth Distribut..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Creon, Laura
;
Ren, Jinlei
;
Choi, Seoyoun
... - p. 1-2 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545475
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Impact of Implantation Conditions on the In-Depth Distribution of Implanted Species in SiC and GaN</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545475&Exemplar=1&LAN=DE A1 Creon, Laura A1 Ren, Jinlei A1 Choi, Seoyoun A1 Peres, Paula A1 Pietrucha, Matt A1 Torregrosa, Frank A1 Morata, Stephane YR 2024 SN 2376-6697 K1 Temperature distribution K1 Energy consumption K1 Silicon carbide K1 Collaboration K1 Semiconductor device manufacture K1 Vectors K1 Power electronics K1 Implantation conditions K1 SiC K1 GaN K1 Dynamic SIMS SP 1 OP 2 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545475 DO https://doi.org/10.1109/ASMC61125.2024.10545475 SF ELIB - SuUB Bremen
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