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1 Ergebnisse
1
Reliable Cu Pillar Undercut Control Using the Endpoint Dete..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Gardner, Zachary
;
Seo, Soon-Cheon
;
Khor, Pijeng
... - p. 1-3 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545485
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Reliable Cu Pillar Undercut Control Using the Endpoint Detection System</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545485&Exemplar=1&LAN=DE A1 Gardner, Zachary A1 Seo, Soon-Cheon A1 Khor, Pijeng A1 Waskiewicz, Chris A1 Sankarapandian, M. A1 Perfecto, Eric A1 Pillai, Karthik A1 Demarest, James YR 2024 SN 2376-6697 K1 Semiconductor device measurement K1 Scanning electron microscopy K1 Semiconductor device manufacture K1 Etching K1 Reliability K1 Copper K1 Optimization SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545485 DO https://doi.org/10.1109/ASMC61125.2024.10545485 SF ELIB - SuUB Bremen
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