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1 Ergebnisse
1
Wet Etch Recipe Optimization for Enabling RMG Multi Vt Sche..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Ramirez, Alma Vela
;
Sankarapandian, M.
;
Bao, Ruqiang
... - p. 1-3 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545486
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Wet Etch Recipe Optimization for Enabling RMG Multi Vt Scheme</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545486&Exemplar=1&LAN=DE A1 Ramirez, Alma Vela A1 Sankarapandian, M. A1 Bao, Ruqiang A1 Parkin, William A1 Makoto, Takaoka A1 Takuya, Kishimoto YR 2024 SN 2376-6697 K1 Wet etching K1 Chemistry K1 Films K1 Gallium arsenide K1 Metals K1 Manuals K1 Logic gates SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545486 DO https://doi.org/10.1109/ASMC61125.2024.10545486 SF ELIB - SuUB Bremen
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