I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Wet Etch Recipe Optimization for Enabling RMG Multi Vt Sche..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Ramirez, Alma Vela
;
Sankarapandian, M.
;
Bao, Ruqiang
... - p. 1-3 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545486
RT T1
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
: T1
Wet Etch Recipe Optimization for Enabling RMG Multi Vt Scheme
UL https://suche.suub.uni-bremen.de/peid=ieee-10545486&Exemplar=1&LAN=DE A1 Ramirez, Alma Vela A1 Sankarapandian, M. A1 Bao, Ruqiang A1 Parkin, William A1 Makoto, Takaoka A1 Takuya, Kishimoto YR 2024 SN 2376-6697 K1 Wet etching K1 Chemistry K1 Films K1 Gallium arsenide K1 Metals K1 Manuals K1 Logic gates SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545486 DO https://doi.org/10.1109/ASMC61125.2024.10545486 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)