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1 Ergebnisse
1
Predictive Analysis and Root Cause Identification of Equipm..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Ki, Wanwook
;
Choi, Minjae
;
Lee, Yongjun
... - p. 01-05 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545492
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Predictive Analysis and Root Cause Identification of Equipment Failures Using Event Log Patterns: A Focus on EUV/DUV Equipment</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545492&Exemplar=1&LAN=DE A1 Ki, Wanwook A1 Choi, Minjae A1 Lee, Yongjun A1 Park, Jisoo A1 Park, Ji Jiyeon A1 Park, Jaeyong A1 Kim, Younghoon YR 2024 SN 2376-6697 K1 Productivity K1 Root cause analysis K1 Costs K1 Target tracking K1 Ultraviolet sources K1 Lithography K1 Knowledge graphs K1 Prediction K1 Breakdown K1 Failure symptom K1 Event log K1 Occurrence rarity K1 EUV K1 DUV SP 01 OP 05 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545492 DO https://doi.org/10.1109/ASMC61125.2024.10545492 SF ELIB - SuUB Bremen
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