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1
Sustainability Model for Semiconductor Manufacturing:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Qi, Eason
;
Luo, Tienying
;
Wick, Mallory
... - p. 1-4 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545500
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Sustainability Model for Semiconductor Manufacturing</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545500&Exemplar=1&LAN=DE A1 Qi, Eason A1 Luo, Tienying A1 Wick, Mallory A1 Armer, Helen A1 Raiford, Michael A1 Marteniz, Tony A1 Mittal, Sanjiv YR 2024 SN 2376-6697 K1 Semiconductor device modeling K1 Semiconductor device measurement K1 Systematics K1 Manufacturing processes K1 Production K1 Semiconductor device manufacture K1 Benchmark testing K1 Sustainability K1 efficiency K1 Energy measurement K1 energy consumption K1 semiconductor manufacturing K1 energy efficiency K1 carbon footprint K1 Environment K1 ESG SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545500 DO https://doi.org/10.1109/ASMC61125.2024.10545500 SF ELIB - SuUB Bremen
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