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Protocol for Thermal Donors Monitoring in High Resistivity ..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Abbadie, Alexandra
;
Desse, Alexandre
;
Melhem, Kassem
... - p. 1-6 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545501
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Protocol for Thermal Donors Monitoring in High Resistivity Silicon Wafers</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545501&Exemplar=1&LAN=DE A1 Abbadie, Alexandra A1 Desse, Alexandre A1 Melhem, Kassem A1 Mariani, Simone Dario A1 Fagiani, Davide A1 Zualiani, Paola A1 Fallerfrank, Frank YR 2024 SN 2376-6697 K1 Protocols K1 Annealing K1 Atmospheric measurements K1 Thermal resistance K1 Atmospheric modeling K1 Conductivity K1 Silicon K1 Thermal Donors K1 high-resistivity silicon K1 thermal treatments K1 metrology SP 1 OP 6 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545501 DO https://doi.org/10.1109/ASMC61125.2024.10545501 SF ELIB - SuUB Bremen
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