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1 Ergebnisse
1
MTP Data Retention Improvement by Salicide Clean Optimizati..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Low, Si Yien
;
Cheng, Gong
;
Islam, Mohd Nurul
.. - p. 01-04 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545506
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>MTP Data Retention Improvement by Salicide Clean Optimization</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545506&Exemplar=1&LAN=DE A1 Low, Si Yien A1 Cheng, Gong A1 Islam, Mohd Nurul A1 San Lee, Chin A1 Li, Xiqiang YR 2024 SN 2376-6697 K1 Degradation K1 Surface cleaning K1 Semiconductor device measurement K1 Nonvolatile memory K1 Friction K1 Semiconductor device reliability K1 Production K1 Data retention K1 embedded non-volatile memory K1 multiple-time-programming K1 floating gate K1 salicide clean SP 01 OP 04 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545506 DO https://doi.org/10.1109/ASMC61125.2024.10545506 SF ELIB - SuUB Bremen
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