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Rapid Thermal Annealing for Shallow Junction and its Impact..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Choi, H.
;
McCutcheon, M.
;
Yin, S.
... - p. 01-04 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545508
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Rapid Thermal Annealing for Shallow Junction and its Impact on FinFET Integration</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545508&Exemplar=1&LAN=DE A1 Choi, H. A1 McCutcheon, M. A1 Yin, S. A1 Sugantharaj, S. A1 Sim, H. A1 Korevaar, B. YR 2024 SN 2376-6697 K1 Rapid thermal annealing K1 Semiconductor device manufacture K1 FinFETs K1 Junctions SP 01 OP 04 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545508 DO https://doi.org/10.1109/ASMC61125.2024.10545508 SF ELIB - SuUB Bremen
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