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Enabling 300 mm Wafer-Scale Fabrication of Superconducting ..:

, In: 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),

Bhatia, Ekta ; Frost, Hunter ; Pieniazek, Nicholas... - p. 1-6 , 2024

Link: https://doi.org/10.1109/ASMC61125.2024.10545509

RT 
T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Enabling 300 mm Wafer-Scale Fabrication of Superconducting Quantum Devices</Title>

UL https://suche.suub.uni-bremen.de/peid=ieee-10545509&Exemplar=1&LAN=DE
				
A1 Bhatia, Ekta
A1 Frost, Hunter
A1 Pieniazek, Nicholas
A1 Nalaskowski, Jakub
A1 Mucci, John
A1 Collison, Wenli
A1 Martinick, Brian
A1 Telhu, Geevanie
A1 Egan, Bryan
A1 Olson, Stephen
A1 Hung, Pui-Yee
A1 Wells, Ilyssa
A1 Johnson, Corbet
A1 Murray, Thomas
A1 Musick, Kevin
A1 Rao, Satyavolu Papa
YR 2024
SN 2376-6697
K1 Technological innovation
K1 Superconducting materials
K1 Superconducting integrated circuits
K1 Tantalum
K1 Qubit
K1 Waveguide junctions
K1 Josephson junctions
K1 superconducting qubit
K1 alpha tantalum
K1 aluminum
K1 ALD TaN
K1 Josephson junction
K1 coplanar waveguide resonators
K1 superconducting quantum PDK
K1 Process Design Kit
K1 Quantum Foundry
SP 1
OP 6
LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545509
DO https://doi.org/10.1109/ASMC61125.2024.10545509
SF ELIB - SuUB Bremen

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