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1 Ergebnisse
1
Machine Learning Based SEM Image Analysis for Automatic Det..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Choi, Sanghyun
;
Xie, Qian
;
Greeneltch, Nathan
... - p. 01-04 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545512
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Machine Learning Based SEM Image Analysis for Automatic Detection and Classification of Wafer Defects</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545512&Exemplar=1&LAN=DE A1 Choi, Sanghyun A1 Xie, Qian A1 Greeneltch, Nathan A1 Lee, Hyung Joo A1 Govindaraj, Mohan A1 Jayaram, Srividya A1 Pereira, Mark A1 Biswas, Sayani A1 Bhamidipati, Samir A1 Torunoglu, Ilhami YR 2024 SN 2376-6697 K1 Semiconductor device modeling K1 YOLO K1 Scanning electron microscopy K1 Reviews K1 Microscopy K1 Layout K1 Machine learning K1 ADC (automatic defect classification) K1 wafer defects K1 SEM (scanning electron microscope) K1 ML model K1 YOLO model SP 01 OP 04 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545512 DO https://doi.org/10.1109/ASMC61125.2024.10545512 SF ELIB - SuUB Bremen
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