I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Effective Downsampling Techniques for SEM Defect Inspection..:
, In:
2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
,
Xie, Qian
;
Viswanatha, S Keerthibala
;
Jayaram, Srividya
... - p. 1-4 , 2024
Link:
https://doi.org/10.1109/ASMC61125.2024.10545518
RT T1 <cTitle>2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)</cTitle>: T1 <Title>Effective Downsampling Techniques for SEM Defect Inspection Using Design Insights in Machine Learning: Topic/category: DI: Defect Inspection and Reduction</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10545518&Exemplar=1&LAN=DE A1 Xie, Qian A1 Viswanatha, S Keerthibala A1 Jayaram, Srividya A1 Krishnankutty, Sudheesh A1 Huguennet, Frederic A1 Soni, Rakesh A1 Basu, Aparna YR 2024 SN 2376-6697 K1 Geometry K1 Systematics K1 Reviews K1 Layout K1 Machine learning K1 Inspection K1 Feature extraction K1 Wafer defect inspection K1 systematic defects K1 BFI to SEM sampling K1 machine learning K1 OPC feature vector K1 GUI based defect analysis SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/ASMC61125.2024.10545518 DO https://doi.org/10.1109/ASMC61125.2024.10545518 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
