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Defect Reduction And Line Width Roughness (LWR) improvement..:

, In: 2024 35th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC),
Ye, Jeff J. ; Pagadala, Raviteja ; Lu, Fei - p. 01-04 , 2024
Link: https://doi.org/10.1109/ASMC61125.2024.10545526