I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
High Thermally Conductive, High-Speed Deposition of AlN by ..:
, In:
2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA)
,
Lee, Ping-Che
;
McLeod, Aaron J.
;
Choi, Mingeun
... - p. 1-2 , 2024
Link:
https://doi.org/10.1109/VLSITSA60681.2024.10546374
RT T1 <cTitle>2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA)</cTitle>: T1 <Title>High Thermally Conductive, High-Speed Deposition of AlN by Bipolar High Power Impulse Magnetron Sputtering</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10546374&Exemplar=1&LAN=DE A1 Lee, Ping-Che A1 McLeod, Aaron J. A1 Choi, Mingeun A1 Vaca, Diego A1 Mora, Diego Contreras A1 Kumar, Satish A1 Kummel, Andrew C. YR 2024 K1 Three-dimensional displays K1 Magnetic domains K1 Thermoreflectance K1 Conductivity K1 Very large scale integration K1 Thermal conductivity K1 Thermal management K1 III-V semiconductor materials K1 Sputtering K1 Aluminum nitride SP 1 OP 2 LK http://dx.doi.org/https://doi.org/10.1109/VLSITSA60681.2024.10546374 DO https://doi.org/10.1109/VLSITSA60681.2024.10546374 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
