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1 Ergebnisse
1
Ultra-thin and High-quality Pt-Silicidation using CW Laser ..:
, In:
2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA)
,
Kim, Seung Mo
;
Kwon, Min Gyu
;
Woo, Taekyu
... - p. 1-2 , 2024
Link:
https://doi.org/10.1109/VLSITSA60681.2024.10546397
RT T1 <cTitle>2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA)</cTitle>: T1 <Title>Ultra-thin and High-quality Pt-Silicidation using CW Laser Annealing Process</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10546397&Exemplar=1&LAN=DE A1 Kim, Seung Mo A1 Kwon, Min Gyu A1 Woo, Taekyu A1 Kim, Ki Sung A1 Lee, Yongsu A1 Hwang, Hyeon Jun A1 Kim, Joon A1 Lee, Byoung Hun YR 2024 K1 Resistance K1 Rapid thermal annealing K1 Laser theory K1 Silicides K1 Lasers K1 Power lasers K1 Platinum alloys SP 1 OP 2 LK http://dx.doi.org/https://doi.org/10.1109/VLSITSA60681.2024.10546397 DO https://doi.org/10.1109/VLSITSA60681.2024.10546397 SF ELIB - SuUB Bremen
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