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1 Ergebnisse
1
Amorphous TeO2 as P-Type Oxide Semiconductor for BEOL Appli..:
, In:
2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA)
,
Robertson, J
;
Zhang, X
;
Gui, Q
. - p. 1-2 , 2024
Link:
https://doi.org/10.1109/VLSITSA60681.2024.10546433
RT T1 <cTitle>2024 International VLSI Symposium on Technology, Systems and Applications (VLSI TSA)</cTitle>: T1 <Title>Amorphous TeO2 as P-Type Oxide Semiconductor for BEOL Applications</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10546433&Exemplar=1&LAN=DE A1 Robertson, J A1 Zhang, X A1 Gui, Q A1 Guo, Y YR 2024 K1 Very large scale integration SP 1 OP 2 LK http://dx.doi.org/https://doi.org/10.1109/VLSITSA60681.2024.10546433 DO https://doi.org/10.1109/VLSITSA60681.2024.10546433 SF ELIB - SuUB Bremen
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