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1 Ergebnisse
1
An Anti-Plasma Etching Film of Y2O3 Film:
, In:
2024 10th International Conference on Applied System Innovation (ICASI)
,
Wei, Chia-Chih
;
Chen, Hsuan-Jung
;
Lee, Yi-Mu
.. - p. 87-89 , 2024
Link:
https://doi.org/10.1109/ICASI60819.2024.10547891
RT T1 <cTitle>2024 10th International Conference on Applied System Innovation (ICASI)</cTitle>: T1 <Title>An Anti-Plasma Etching Film of Y2O3 Film</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10547891&Exemplar=1&LAN=DE A1 Wei, Chia-Chih A1 Chen, Hsuan-Jung A1 Lee, Yi-Mu A1 Chang, Shao-Fu A1 Chen, Chien-Chon YR 2024 SN 2768-4156 K1 Resistance K1 Technological innovation K1 Powders K1 Image analysis K1 Corrosion K1 Semiconductor device manufacture K1 Thermal spraying K1 Y2O3 K1 Aluminum K1 Coating K1 Porosity SP 87 OP 89 LK http://dx.doi.org/https://doi.org/10.1109/ICASI60819.2024.10547891 DO https://doi.org/10.1109/ICASI60819.2024.10547891 SF ELIB - SuUB Bremen
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