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1 Ergebnisse
1
Towards Porous SI THz Planar Waveguides in Ultra-Low-Resist..:
, In:
2024 15th Global Symposium on Millimeter-Waves & Terahertz (GSMM)
,
Ma, Shiqi
;
Nabet, Massinissa
;
Hanus, Romain
... - p. 225-227 , 2024
Link:
https://doi.org/10.1109/GSMM61775.2024.10553004
RT T1 <cTitle>2024 15th Global Symposium on Millimeter-Waves & Terahertz (GSMM)</cTitle>: T1 <Title>Towards Porous SI THz Planar Waveguides in Ultra-Low-Resistivity Substrates</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10553004&Exemplar=1&LAN=DE A1 Ma, Shiqi A1 Nabet, Massinissa A1 Hanus, Romain A1 Raskin, Jean-Pierre A1 Francis, Laurent A. A1 Lederer, Dimitri YR 2024 SN 2694-2968 K1 Wafer bonding K1 Semiconductor device modeling K1 Dielectric losses K1 Conductivity K1 Etching K1 Planar waveguides K1 Porous silicon K1 waveguide (WG) K1 effective dielectric permittivity K1 effective resistivity K1 microwave losses K1 porous silicon (PSi) K1 ultra-low-resistivity (ULR) substrate K1 trap-rich (TR) K1 high-resistivity (HR) silicon K1 THz waveguide SP 225 OP 227 LK http://dx.doi.org/https://doi.org/10.1109/GSMM61775.2024.10553004 DO https://doi.org/10.1109/GSMM61775.2024.10553004 SF ELIB - SuUB Bremen
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