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1 Ergebnisse
1
Scalable Fabrication of 3D Optical Re-distribution for Co-P..:
, In:
2024 IEEE 74th Electronic Components and Technology Conference (ECTC)
,
Nakamura, Fumi
;
Suzuki, Kenta
;
Noriki, Akihiro
... - p. 1404-1408 , 2024
Link:
https://doi.org/10.1109/ECTC51529.2024.00229
RT T1
2024 IEEE 74th Electronic Components and Technology Conference (ECTC)
: T1
Scalable Fabrication of 3D Optical Re-distribution for Co-Packaged Optics using an Developed Nanoimprint Stepper
UL https://suche.suub.uni-bremen.de/peid=ieee-10564889&Exemplar=1&LAN=DE A1 Nakamura, Fumi A1 Suzuki, Kenta A1 Noriki, Akihiro A1 Suda, Satoshi A1 Kurosu, Takayuki A1 Amano, Takeru YR 2024 SN 2377-5726 K1 Three-dimensional displays K1 Optical device fabrication K1 Electronic components K1 Optical waveguide components K1 Silicon photonics K1 Substrates K1 Standards K1 co-packaged optics K1 datacenter K1 polymer waveguide K1 silicon photonics K1 imprint technology SP 1404 OP 1408 LK http://dx.doi.org/https://doi.org/10.1109/ECTC51529.2024.00229 DO https://doi.org/10.1109/ECTC51529.2024.00229 SF ELIB - SuUB Bremen
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