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1 Ergebnisse
1
World's Smallest, Membrane-Based Capacitive Differential Pr..:
, In:
2024 IEEE 74th Electronic Components and Technology Conference (ECTC)
,
Hassan, K M Rafidh
;
Mehrotra, Gaurav
;
Caballero, Hazel
... - p. 2075-2082 , 2024
Link:
https://doi.org/10.1109/ECTC51529.2024.00354
RT T1
2024 IEEE 74th Electronic Components and Technology Conference (ECTC)
: T1
World's Smallest, Membrane-Based Capacitive Differential Pressure Sensor-Package Structure, Material Selection, Assembly Challenges and Solutions
UL https://suche.suub.uni-bremen.de/peid=ieee-10564943&Exemplar=1&LAN=DE A1 Hassan, K M Rafidh A1 Mehrotra, Gaurav A1 Caballero, Hazel A1 Kim, Young A1 Lee, Steven A1 Allidina, Karim A1 Tsang, Tommy A1 Elsayed, Mohannad A1 Tawfik, Hani YR 2024 SN 2377-5726 K1 Micromechanical devices K1 Pressure sensors K1 Temperature sensors K1 Sensitivity K1 Wires K1 Coatings K1 Substrates K1 Differential Pressure Sensor (DPS) K1 MEMS Sensors K1 ASIC K1 IoT K1 LCP K1 Air Cavity Substrate K1 Low Modulus Die Attach K1 Stress Decoupling K1 BLT Optimization K1 MEMS coating K1 Accelerated Life Testing K1 UV-cure K1 Burst Pressure K1 Orientation Sensitivity K1 RH sensitivity K1 Offset K1 Normalized span SP 2075 OP 2082 LK http://dx.doi.org/https://doi.org/10.1109/ECTC51529.2024.00354 DO https://doi.org/10.1109/ECTC51529.2024.00354 SF ELIB - SuUB Bremen
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