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World's Smallest, Membrane-Based Capacitive Differential Pr..:

, In: 2024 IEEE 74th Electronic Components and Technology Conference (ECTC),

Hassan, K M Rafidh ; Mehrotra, Gaurav ; Caballero, Hazel... - p. 2075-2082 , 2024

Link: https://doi.org/10.1109/ECTC51529.2024.00354

RT 
T1 <cTitle>2024 IEEE 74th Electronic Components and Technology Conference (ECTC)</cTitle>: T1 <Title>World's Smallest, Membrane-Based Capacitive Differential Pressure Sensor-Package Structure, Material Selection, Assembly Challenges and Solutions</Title>

UL https://suche.suub.uni-bremen.de/peid=ieee-10564943&Exemplar=1&LAN=DE
				
A1 Hassan, K M Rafidh
A1 Mehrotra, Gaurav
A1 Caballero, Hazel
A1 Kim, Young
A1 Lee, Steven
A1 Allidina, Karim
A1 Tsang, Tommy
A1 Elsayed, Mohannad
A1 Tawfik, Hani
YR 2024
SN 2377-5726
K1 Micromechanical devices
K1 Pressure sensors
K1 Temperature sensors
K1 Sensitivity
K1 Wires
K1 Coatings
K1 Substrates
K1 Differential Pressure Sensor (DPS)
K1 MEMS Sensors
K1 ASIC
K1 IoT
K1 LCP
K1 Air Cavity Substrate
K1 Low Modulus Die Attach
K1 Stress Decoupling
K1 BLT Optimization
K1 MEMS coating
K1 Accelerated Life Testing
K1 UV-cure
K1 Burst Pressure
K1 Orientation Sensitivity
K1 RH sensitivity
K1 Offset
K1 Normalized span
SP 2075
OP 2082
LK http://dx.doi.org/https://doi.org/10.1109/ECTC51529.2024.00354
DO https://doi.org/10.1109/ECTC51529.2024.00354
SF ELIB - SuUB Bremen

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