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1 Ergebnisse
1
Resonance Type Electrical Variable Capacitor with Reduced A..:
, In:
2024 IEEE 10th International Power Electronics and Motion Control Conference (IPEMC2024-ECCE Asia)
,
Choi, Heewon
;
Kim, Hongmin
;
Hwang, Cheonghyeon
.. - p. 3227-3233 , 2024
Link:
https://doi.org/10.1109/IPEMC-ECCEAsia60879.2024.10567..
RT T1 <cTitle>2024 IEEE 10th International Power Electronics and Motion Control Conference (IPEMC2024-ECCE Asia)</cTitle>: T1 <Title>Resonance Type Electrical Variable Capacitor with Reduced Active Devices Loss for 13.56 MHz RF Plasma System</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10567841&Exemplar=1&LAN=DE A1 Choi, Heewon A1 Kim, Hongmin A1 Hwang, Cheonghyeon A1 Lim, Cheonyong A1 Suh, Yongsug YR 2024 K1 Radio frequency K1 Vacuum systems K1 Impedance matching K1 Circuits K1 Capacitors K1 Switches K1 Resonance K1 Electrical Variable Capacitor K1 Impedance Matching Network K1 RF Plasma System K1 Vacuum Variable Capacitor SP 3227 OP 3233 LK http://dx.doi.org/https://doi.org/10.1109/IPEMC-ECCEAsia60879.2024.10567841 DO https://doi.org/10.1109/IPEMC-ECCEAsia60879.2024.10567841 SF ELIB - SuUB Bremen
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