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Investigation of CMOS Single Process Steps on 4H-SiC a-Plan..:
, In:
2024 47th MIPRO ICT and Electronics Convention (MIPRO)
,
Schwarberg, Jannik H.
;
Karhu, Robin
;
Kallinger, Birgit
... - p. 1566-1572 , 2024
Link:
https://doi.org/10.1109/MIPRO60963.2024.10569589
RT T1
2024 47th MIPRO ICT and Electronics Convention (MIPRO)
: T1
Investigation of CMOS Single Process Steps on 4H-SiC a-Plane Wafers for Quantum Applications
UL https://suche.suub.uni-bremen.de/peid=ieee-10569589&Exemplar=1&LAN=DE A1 Schwarberg, Jannik H. A1 Karhu, Robin A1 Kallinger, Birgit A1 Rommel, Mathias A1 Schmidt, Robin A1 Schulze, Jorg YR 2024 SN 2623-8764 K1 Ion implantation K1 Crystals K1 CMOS process K1 Oxidation K1 Silicon K1 Surface roughness K1 Rough surfaces K1 keywords-a-plane K1 4H-SiC K1 silicon vacancies K1 VSi K1 CMOS K1 epitaxy K1 ion implantation K1 channeling K1 thermal oxidation SP 1566 OP 1572 LK http://dx.doi.org/https://doi.org/10.1109/MIPRO60963.2024.10569589 DO https://doi.org/10.1109/MIPRO60963.2024.10569589 SF ELIB - SuUB Bremen
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