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1 Ergebnisse
1
Within-Chip Bridged-Pattern Short Detection Using Spatially..:
, In:
2024 IEEE 33rd Microelectronics Design & Test Symposium (MDTS)
,
Lin, C.Y.
;
Ogino, A.
;
Lee, C.H.
... - p. 1-3 , 2024
Link:
https://doi.org/10.1109/MDTS61600.2024.10570113
RT T1 <cTitle>2024 IEEE 33rd Microelectronics Design & Test Symposium (MDTS)</cTitle>: T1 <Title>Within-Chip Bridged-Pattern Short Detection Using Spatially Distributed Kerf Test Structures in 7nm FinFET Technology</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10570113&Exemplar=1&LAN=DE A1 Lin, C.Y. A1 Ogino, A. A1 Lee, C.H. A1 Bang, Y.S. A1 Jeong, B.W. A1 Choi, D.U. A1 Wu, S. A1 Xin, Y. A1 Walsh, B. A1 Manya, C. A1 Sim, J. A1 Angyal, M. YR 2024 SN 2573-7600 K1 Latches K1 Manufacturing processes K1 Correlation K1 Lithography K1 Layout K1 Metals K1 FinFETs K1 Kerf Test Structure K1 Inline Scan Chain Latch K1 Within-chip Non-uniform Yield K1 Early Detection SP 1 OP 3 LK http://dx.doi.org/https://doi.org/10.1109/MDTS61600.2024.10570113 DO https://doi.org/10.1109/MDTS61600.2024.10570113 SF ELIB - SuUB Bremen
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