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1 Ergebnisse
1
Multi-Modal Extreme-Ultraviolet Reflectometer: Solving Inve..:
, In:
2024 IEEE Conference on Computational Imaging Using Synthetic Apertures (CISA)
,
Shao, Yunzhe
;
Jenkins, Nicholas W.
;
Klein, Clay
... - p. 1-5 , 2024
Link:
https://doi.org/10.1109/CISA60639.2024.10576406
RT T1 <cTitle>2024 IEEE Conference on Computational Imaging Using Synthetic Apertures (CISA)</cTitle>: T1 <Title>Multi-Modal Extreme-Ultraviolet Reflectometer: Solving Inverse Problems in Nanostructure Metrology</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10576406&Exemplar=1&LAN=DE A1 Shao, Yunzhe A1 Jenkins, Nicholas W. A1 Klein, Clay A1 Li, Yunhao A1 Esashi, Yuka A1 Murnane, Margaret M. A1 Kapteyn, Henry C. A1 Tanksalvala, Michael YR 2024 K1 Radar measurements K1 Inverse problems K1 Ultraviolet sources K1 Imaging K1 Reflectometry K1 Metrology K1 Surfaces K1 Inverse problem K1 extreme-ultraviolet light K1 reflectometry K1 scatterometry K1 coherent diffractive imaging SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/CISA60639.2024.10576406 DO https://doi.org/10.1109/CISA60639.2024.10576406 SF ELIB - SuUB Bremen
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