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1 Ergebnisse
1
Evaluation of Optical Interferometry for Thickness Uniformi..:
, In:
2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)
,
Riahi, S.
;
Becan, G.
;
Ammar, M.
... - p. 1-4 , 2024
Link:
https://doi.org/10.1109/DTIP62575.2024.10613152
RT T1 <cTitle>2024 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)</cTitle>: T1 <Title>Evaluation of Optical Interferometry for Thickness Uniformity Control of Parylene HT Coating on Titanium Substrates</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10613152&Exemplar=1&LAN=DE A1 Riahi, S. A1 Becan, G. A1 Ammar, M. A1 Bosseboeuf, A. A1 Laourine, F. A1 Boutaud, B. A1 Bouville, D. A1 Harouri, A. A1 Coste, P. A1 Lefeuvre, E. YR 2024 SN 2768-1874 K1 Optical interferometry K1 Correlation K1 Accuracy K1 Titanium K1 Packaging K1 Coatings K1 Reliability K1 Parylene HT K1 Thickness K1 White-Light Scanning Interferometry K1 non-destructive measurements K1 Etching SP 1 OP 4 LK http://dx.doi.org/https://doi.org/10.1109/DTIP62575.2024.10613152 DO https://doi.org/10.1109/DTIP62575.2024.10613152 SF ELIB - SuUB Bremen
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