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1 Ergebnisse
1
Simulation of MEMS Microfabrication Process Based on Narrow..:
, In:
2024 2nd International Symposium of Electronics Design Automation (ISEDA)
,
Zheng, Bin-Bin
;
Zhou, Zai-Fa
;
Liu, Ji-Yang
.. - p. 84-88 , 2024
Link:
https://doi.org/10.1109/ISEDA62518.2024.10617885
RT T1 <cTitle>2024 2nd International Symposium of Electronics Design Automation (ISEDA)</cTitle>: T1 <Title>Simulation of MEMS Microfabrication Process Based on Narrow Band Level Set and Ray Tracing Methods</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10617885&Exemplar=1&LAN=DE A1 Zheng, Bin-Bin A1 Zhou, Zai-Fa A1 Liu, Ji-Yang A1 Bao, Su-Xin A1 Huang, Qing-An YR 2024 K1 Monte Carlo methods K1 Level set K1 Microfabrication K1 Surface morphology K1 Morphology K1 Evolutionary computation K1 Ray tracing K1 MEMS process simulation K1 narrow band level set K1 ray tracing SP 84 OP 88 LK http://dx.doi.org/https://doi.org/10.1109/ISEDA62518.2024.10617885 DO https://doi.org/10.1109/ISEDA62518.2024.10617885 SF ELIB - SuUB Bremen
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