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1 Ergebnisse
1
Numerical simulation and experimental study on the influenc..:
, In:
2024 IEEE International Conference on Plasma Science (ICOPS)
,
Jin, X.
;
Zhao, P.
;
Li, J.
... - p. 1-1 , 2024
Link:
https://doi.org/10.1109/ICOPS58192.2024.10626415
RT T1 <cTitle>2024 IEEE International Conference on Plasma Science (ICOPS)</cTitle>: T1 <Title>Numerical simulation and experimental study on the influence of RF frequency on characteristics in inductively coupled plasma</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10626415&Exemplar=1&LAN=DE A1 Jin, X. A1 Zhao, P. A1 Li, J. A1 Li, L. A1 Liu, C. A1 Geng, C. A1 Lin, Q. A1 Hu, L. YR 2024 SN 2576-7208 K1 Radio frequency K1 Temperature distribution K1 Two-dimensional displays K1 Numerical simulation K1 Discharges (electric) K1 Plasmas K1 Electron tubes SP 1 OP 1 LK http://dx.doi.org/https://doi.org/10.1109/ICOPS58192.2024.10626415 DO https://doi.org/10.1109/ICOPS58192.2024.10626415 SF ELIB - SuUB Bremen
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