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1 Ergebnisse
1
Effect of SiNx Deposition Temperature on Performance Charac..:
, In:
2024 4th International Conference on Electronics, Circuits and Information Engineering (ECIE)
,
Luo, Wenchao
;
Guo, Hu
;
Tang, Hui
... - p. 124-128 , 2024
Link:
https://doi.org/10.1109/ECIE61885.2024.10626757
RT T1 <cTitle>2024 4th International Conference on Electronics, Circuits and Information Engineering (ECIE)</cTitle>: T1 <Title>Effect of SiNx Deposition Temperature on Performance Characteristics of AMR Angle Sensors</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10626757&Exemplar=1&LAN=DE A1 Luo, Wenchao A1 Guo, Hu A1 Tang, Hui A1 Tian, Jinpeng A1 Zhang, Wenwei A1 Jia, Yuan YR 2024 K1 Performance evaluation K1 Temperature sensors K1 Chemical sensors K1 Sensitivity K1 Temperature K1 Magnetic sensors K1 Magnetoresistive devices K1 Magnetoresistive effect K1 SiNx passivation layer K1 AMR sensor SP 124 OP 128 LK http://dx.doi.org/https://doi.org/10.1109/ECIE61885.2024.10626757 DO https://doi.org/10.1109/ECIE61885.2024.10626757 SF ELIB - SuUB Bremen
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