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1 Ergebnisse
1
The Suppression Mechanism of Parasitic Capacitance for Comb..:
, In:
2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
,
Tan, Renjie
;
Yang, Juan
;
Zhao, Libo
... - p. 1-5 , 2024
Link:
https://doi.org/10.1109/NEMS60219.2024.10639546
RT T1 <cTitle>2024 IEEE 19th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)</cTitle>: T1 <Title>The Suppression Mechanism of Parasitic Capacitance for Comb Capacitor Fabricated with Silicon-On-Insulation</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-10639546&Exemplar=1&LAN=DE A1 Tan, Renjie A1 Yang, Juan A1 Zhao, Libo A1 Han, Xiangguang A1 Li, Wei A1 Xia, Yong A1 Gao, Yi A1 Wang, Chengying A1 Jiang, Zhuangde YR 2024 SN 2474-3755 K1 Micromechanical devices K1 Analytical models K1 Capacitors K1 Silicon K1 Software K1 Nanoscale devices K1 Integrated circuit modeling K1 SOI K1 comb K1 parasitic capacitance K1 FEM SP 1 OP 5 LK http://dx.doi.org/https://doi.org/10.1109/NEMS60219.2024.10639546 DO https://doi.org/10.1109/NEMS60219.2024.10639546 SF ELIB - SuUB Bremen
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