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A 1Mb CMOS EPROM with a 13.5 µm2cell:

, In: 1987 IEEE International Solid-State Circuits Conference. Digest of Technical Papers,
Coffman, T. ; Boyd, D. ; Dolby, D.... - p. 72,73 , 1987
Link: https://doi.org/10.1109/ISSCC.1987.1157140