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1
A miniaturized electron beam column simulation by the FCM m..:
, In:
2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers.
,
Youngchul Kim
;
Dae-Wook Kim
;
Do Wan Kim
... - p. 112,113 , 2002
Link:
https://doi.org/10.1109/IMNC.2002.1178569
RT T1 <cTitle>2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers.</cTitle>: T1 <Title>A miniaturized electron beam column simulation by the FCM method</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-1178569&Exemplar=1&LAN=DE A1 Youngchul Kim A1 Dae-Wook Kim A1 Do Wan Kim A1 Seung Joon Ahn A1 Chulsu Jo A1 Ho-Seob Kim YR 2002 K1 Electron beams K1 Lenses K1 Materials science and technology K1 Finite difference methods K1 Electron emission K1 Physics K1 Mathematics K1 Least squares methods K1 Finite element methods K1 Mesh generation SP 112,113 LK http://dx.doi.org/https://doi.org/10.1109/IMNC.2002.1178569 DO https://doi.org/10.1109/IMNC.2002.1178569 SF ELIB - SuUB Bremen
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