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Evaporated electron beam sensitive organic resist for the b..:

, In: 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers.,
Lavallee, E. ; Schattenburg, M. ; Beauvais, J.... - p. 320,321 , 2002
Link: https://doi.org/10.1109/IMNC.2002.1178672