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High mobility MISFET with low trapped charge in HfSiO films:

, In: 2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407),
Morioka, Ayuka ; Watanabe, Hirohito ; Miyamura, Makoto... - p. 165,166 , 2003
Link: https://doi.org/10.1109/VLSIT.2003.1221137