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Reverse-order source/drain formation with double offset spa..:

, In: Proceedings of the 2003 International Symposium on Low Power Electronics and Design, 2003. ISLPED '03.,
Woo Young Choi ; Jong Duk Lee ; Byung-Gook Park - p. 189,190,191,192 , 2003
Link: https://doi.org/10.1109/LPE.2003.1231860