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1 Ergebnisse
1
Fabrication of corrugated curved beam type electrostatic ac..:
, In:
Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference
,
Yen-Jyh Lai
;
Chengkuo Lee
;
Chia-Yu Wu
... - p. 286-287 , 2003
Link:
https://doi.org/10.1109/IMNC.2003.1268758
RT T1 <cTitle>Digest of Papers Microprocesses and Nanotechnology 2003. 2003 International Microprocesses and Nanotechnology Conference</cTitle>: T1 <Title>Fabrication of corrugated curved beam type electrostatic actuator and SDA driven self-assembling mechanism for VOA applications</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-1268758&Exemplar=1&LAN=DE A1 Yen-Jyh Lai A1 Chengkuo Lee A1 Chia-Yu Wu A1 Yu-Shen Lin A1 Ming Hung Tasi A1 Ruey-Shing Huang A1 Min-Shyong Lin YR 2003 K1 Fabrication K1 Electrostatic actuators K1 Micromechanical devices K1 Attenuation K1 Electrodes K1 Voltage K1 Assembly K1 Optical fiber devices K1 Insertion loss K1 Residual stresses SP 286 OP 287 LK http://dx.doi.org/https://doi.org/10.1109/IMNC.2003.1268758 DO https://doi.org/10.1109/IMNC.2003.1268758 SF ELIB - SuUB Bremen
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