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MEMS for a watches:

, In: 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest,
Noell, W. ; Clerc, P.-A. ; Jeanneret, S.... - p. 1-4 , 2004
Link: https://doi.org/10.1109/MEMS.2004.1290507