I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
New development in CVD tungsten technology for multilevel i..:
, In:
1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference
,
Ahn, K.Y.
- p. 125,126,127,128,129,130,131,132,133,134 , 1988
Link:
https://doi.org/10.1109/VMIC.1988.14184
RT T1 <cTitle>1988. Proceedings., Fifth International IEEE VLSI Multilevel Interconnection Conference</cTitle>: T1 <Title>New development in CVD tungsten technology for multilevel interconnection</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-14184&Exemplar=1&LAN=DE A1 Ahn, K.Y. YR 1988 K1 Tungsten K1 Temperature K1 Optical films K1 Hydrogen K1 Tunneling K1 Filling K1 Leakage current K1 Frequency K1 Cleaning K1 Chemical vapor deposition SP 125,126,127,128,129,130,131,132,133,134 LK http://dx.doi.org/https://doi.org/10.1109/VMIC.1988.14184 DO https://doi.org/10.1109/VMIC.1988.14184 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)
