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1 Ergebnisse
1
Corner effects in vertical MOSFETs:
, In:
Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004.
,
Xiaoyu Hou
;
Falong Zhou
;
Ru Huang
. - p. 134,135,136,137 , 2004
Link:
https://doi.org/10.1109/ICSICT.2004.1434971
RT T1
Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004.
: T1
Corner effects in vertical MOSFETs
UL https://suche.suub.uni-bremen.de/peid=ieee-1434971&Exemplar=1&LAN=DE A1 Xiaoyu Hou A1 Falong Zhou A1 Ru Huang A1 Xing Zhang YR 2004 K1 MOSFETs K1 Doping K1 Leakage current K1 Tiles K1 Lithography K1 Silicon K1 Microelectronics K1 Etching K1 Impurities K1 Shape SP 134,135,136,137 LK http://dx.doi.org/https://doi.org/10.1109/ICSICT.2004.1434971 DO https://doi.org/10.1109/ICSICT.2004.1434971 SF ELIB - SuUB Bremen
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