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CMOS shallow trench isolation x-stress effect on channel wi..:

, In: Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004.,
Tan, P.B.Y. ; Kordesch, A.V. ; Sidek, O. - p. 319,320 , 2004
Link: https://doi.org/10.1109/ICSICT.2004.1435016