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Fabrication of strained Si channel PMOSFET on thin relaxed ..:

, In: Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004.,
Mei Ding-lei ; Yang Mo-hua ; Li Jing-chun... - p. 325,326,327 , 2004
Link: https://doi.org/10.1109/ICSICT.2004.1435018