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A novel NiSi selective wet etch on Si and on SiGe:

, In: Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004.,
Bonfanti, P. ; Hongxiang Mo ; Bei Zhu... - p. 468,469,470,471 , 2004
Link: https://doi.org/10.1109/ICSICT.2004.1435049