I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

Low resistivity copper interconnection layers:

, In: Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004.,
Hara, T. ; Namiki, K. ; Shimura, Y. - p. 514,515,516,517,518,519 , 2004
Link: https://doi.org/10.1109/ICSICT.2004.1435059