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1 Ergebnisse
1
CD uniformity improvement and IC process monitoring by wire..:
, In:
Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004.
,
Shi-Qing Wang
;
MacDonald, P.
;
Kruger, M.
.. - p. 538,539,540,541 , 2004
Link:
https://doi.org/10.1109/ICSICT.2004.1435064
RT T1 <cTitle>Proceedings. 7th International Conference on Solid-State and Integrated Circuits Technology, 2004.</cTitle>: T1 <Title>CD uniformity improvement and IC process monitoring by wireless sensor technology</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-1435064&Exemplar=1&LAN=DE A1 Shi-Qing Wang A1 MacDonald, P. A1 Kruger, M. A1 Spanos, C. A1 Welch, M. YR 2004 K1 Monitoring K1 Wireless sensor networks K1 Temperature sensors K1 Plasma temperature K1 Etching K1 Plasma applications K1 Chemical technology K1 Temperature control K1 Process control K1 Plasma chemistry SP 538,539,540,541 LK http://dx.doi.org/https://doi.org/10.1109/ICSICT.2004.1435064 DO https://doi.org/10.1109/ICSICT.2004.1435064 SF ELIB - SuUB Bremen
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