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Development of on-line monitoring system for vacuum degree ..:

, In: Fourtieth IAS Annual Meeting. Conference Record of the 2005 Industry Applications Conference, 2005.,
Lixing Zhou ; Renjun Zhou ; Weiguo Li.. - p. 848,849,850,851 , 2005
Link: https://doi.org/10.1109/IAS.2005.1518436