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Embedded MEMS filter chip and its fabrication for VHF appli..:

, In: IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest.,
Mitarai, S. ; Tada, M. ; Yanagawa, S.... - p. 4 pp. , 2005
Link: https://doi.org/10.1109/IEDM.2005.1609331