I agree that this site is using cookies. You can find further informations
here
.
X
Login
Merkliste (
0
)
Home
About us
Home About us
Our history
Profile
Press & public relations
Friends
The library in figures
Exhibitions
Projects
Training, internships, careers
Films
Services & Information
Home Services & Information
Lending and interlibrary loans
Returns and renewals
Training and library tours
My Account
Library cards
New to the library?
Download Information
Opening hours
Learning spaces
PC, WLAN, copy, scan and print
Catalogs and collections
Home Catalogs and Collections
Rare books and manuscripts
Digital collections
Subject Areas
Our sites
Home Our sites
Central Library
Law Library (Juridicum)
BB Business and Economics (BB11)
BB Physics and Electrical Engineering
TB Engineering and Social Sciences
TB Economics and Nautical Sciences
TB Music
TB Art & Design
TB Bremerhaven
Contact the library
Home Contact the library
Staff Directory
Open access & publishing
Home Open access & publishing
Reference management: Citavi & RefWorks
Publishing documents
Open Access in Bremen
zur Desktop-Version
Toggle navigation
Merkliste
1 Ergebnisse
1
Damage-Free Low-k Treatment Verified by a Novel Microwave M..:
, In:
2006 International Interconnect Technology Conference
,
Tsai, J.S.
;
Liang, M.C.
;
Lee, T.L.
... - p. 75-77 , 2006
Link:
https://doi.org/10.1109/IITC.2006.1648650
RT T1
2006 International Interconnect Technology Conference
: T1
Damage-Free Low-k Treatment Verified by a Novel Microwave Measurement
UL https://suche.suub.uni-bremen.de/peid=ieee-1648650&Exemplar=1&LAN=DE A1 Tsai, J.S. A1 Liang, M.C. A1 Lee, T.L. A1 Chen, L.C. A1 Shieh, J.H. A1 Lee, J.J. A1 Hwang, R.L. A1 Jang, S.M. A1 Liang, M.S. YR 2006 SN 2380-632X SN 2380-6338 K1 Microwave measurements K1 Ash K1 Dielectric measurements K1 Probes K1 Dielectric constant K1 Optical surface waves K1 Discrete Fourier transforms K1 Optical films K1 Semiconductor device manufacture K1 Surface treatment SP 75 OP 77 LK http://dx.doi.org/https://doi.org/10.1109/IITC.2006.1648650 DO https://doi.org/10.1109/IITC.2006.1648650 SF ELIB - SuUB Bremen
Export
RefWorks (nur Desktop-Version!)
Flow
(Zuerst in
Flow
einloggen, dann importieren)