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1 Ergebnisse
1
Bulk Micromachined Electrothermal Hydraulic Microactuator a..:
, In:
The Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators 2006
,
Lucyszyn, S.
;
Jun Su Lee
;
Lucyszyn, S.
. - p. 309-316 , 2006
Link:
https://doi.org/10.1049/ic:20060473
RT T1 <cTitle>The Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators 2006</cTitle>: T1 <Title>Bulk Micromachined Electrothermal Hydraulic Microactuator and Its Applications</Title> UL https://suche.suub.uni-bremen.de/peid=ieee-1662206&Exemplar=1&LAN=DE A1 Lucyszyn, S. A1 Jun Su Lee A1 Lucyszyn, S. A1 Jun Su Lee YR 2006 SN 0537-9989 SP 309 OP 316 LK http://dx.doi.org/https://doi.org/10.1049/ic:20060473 DO https://doi.org/10.1049/ic:20060473 SF ELIB - SuUB Bremen
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