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Lower Resistance Scaled Metal Contacts to Silicide for Adva..:

, In: 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers.,
Ieong, M. ; Sung, C.Y. ; Deshpande, S.... - p. S. Cohen-L. Deligianni , 2006
Link: https://doi.org/10.1109/VLSIT.2006.1705244