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Pre-Metal Dielectric Stress Engineering by a Novel Plasma T..:

, In: 2006 Symposium on VLSI Technology, 2006. Digest of Technical Papers.,
Jeong, Y.-K. ; Roh, K. ; Kang, K.-H.... - p. 136-137 , 2006
Link: https://doi.org/10.1109/VLSIT.2006.1705254