I agree that this site is using cookies. You can find further informations here.
X
Merkliste 
 1 Ergebnisse 
 
1

Two Dimensional MEMS Piston Array for DUV Optical Pattern G..:

, In: IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2006.,
Lopez, D. ; Pardo, F. ; Bolle, C.... - p. 148-149 , 2006
Link: https://doi.org/10.1109/OMEMS.2006.1708308