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Development of design rules for reliable tungsten plugs usi..:
, In:
30th Annual Proceedings Reliability Physics 1992
,
IslamRaja, M.M.
;
Bariya, A.J.
;
Saraswat, K.C.
... - p. 8,9,10 , 1992
Link:
https://doi.org/10.1109/RELPHY.1992.187614
RT T1
30th Annual Proceedings Reliability Physics 1992
: T1
Development of design rules for reliable tungsten plugs using simulations
UL https://suche.suub.uni-bremen.de/peid=ieee-187614&Exemplar=1&LAN=DE A1 IslamRaja, M.M. A1 Bariya, A.J. A1 Saraswat, K.C. A1 Cappelli, M.A. A1 McVittie, J.P. A1 Moberly, L. A1 Lahri, R. YR 1992 K1 Tungsten K1 Plugs K1 Etching K1 Computer simulation K1 Fabrication K1 Surfaces K1 CMOS technology K1 Dielectric losses K1 Computational modeling K1 Mechanical engineering SP 8,9,10 LK http://dx.doi.org/https://doi.org/10.1109/RELPHY.1992.187614 DO https://doi.org/10.1109/RELPHY.1992.187614 SF ELIB - SuUB Bremen
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